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clean track system

Product Detail Information

Configuration (std)
· 4”, 6~8” , 12” Spin Unit
· 4-IND’X cassette& 3-IND’X SMIF cassette
· High throughput Robot
· Max.8-spin (2 Block)
· HP,CP,AD Unit (Max.24unit)
· RRC/ EBR/BR nozzle
· WEE & Inline to stepper
· Easy user interface & maintenance